Formation of XeI(B) in low pressure inductive radio frequency electric discharges sustained in mixtures of Xe and I2
نویسندگان
چکیده
Low pressure excimer discharges ~,1–5 Torr! are of interest for use as ultraviolet sources for lighting applications. XeI(B) is an attractive candidate for excimer lamps due to the low corrosive properties of iodine. The excimer is thought to be formed by either harpoon or ion-ion recombination reactions, the latter of which requires a third body. The formation of the excimer at low pressures is therefore problematic. To address this issue, an investigation was conducted to determine the kinetic processes which produce XeI(B) in a low pressure ~0.5–5 Torr! inductive radio frequency discharge sustained in Xe and I2 . The diagnostics applied in this study include laser-induced fluorescence, optical absorption spectroscopy, and optical emission spectroscopy. Our results indicate that for the experimental conditions, Xe1I2**→XeI~B)1I is a major reaction producing the excimer. This result differs from studies performed at higher pressures which concluded that the harpoon reaction between Xe* and I2 or ionic recombination between Xe2 1 and I are the major sources of XeI(B). © 1996 American Institute of Physics. @S0021-8979~96!03222-7#
منابع مشابه
Ion-ion neutralization of iodine in radio-frequency inductive discharges of Xe and I2 mixtures
Xe/I2 low-pressure electric discharges are being developed as efficient, long-lived ultraviolet lighting sources. In this work the kinetics of low pressure, 0.5–5 Torr, radio-frequency inductively excited discharges sustained in Xe and I2 were investigated to determine the source of radiating states. The diagnostics applied in this study include optical absorption and emission spectroscopy, mic...
متن کاملReactions in the afterglow of time modulated inductive discharges of Xe and I2 mixtures
An investigation was conducted using absorption and emission spectroscopy of the afterglow from rf inductive discharges in Xe/I2 mixtures. RF power at 11.5 MHz was supplied to coils surrounding a cylindrical discharge cell. Total pressures were between 0.8 and 5.3 Torr. Measurements were made as a function of radius and time following the termination of the discharge. Results presented here ind...
متن کاملModeling the transitions from capacitive to inductive to wave-sustained rf discharges
Radio frequency (rf) plasma sources used in the processing of thin films can be divided into three distinct categories: capacitive (E), inductive (H), and wave (W) -sustained (e.g., helicon) discharges. As the excitation power or voltage is increased, transitions from capacitive to inductive to helicon discharges are often observed, in some cases exhibiting hysteresis. A model is developed to d...
متن کاملEffects of Plasma Discharge Parameters on the Nano-Particles Formation in the PECVD Reactor
In this paper, the effects of plasma discharge parameters on the nano particles formation process in a plasma enhanced chemical vapor deposition (PECVD) reactor using a model based on equations of ionization kinetics for different active species are studied. A radio frequency applied electric field causes ionization inside the reactor and consequently different reaction schemically active speci...
متن کاملO2„ D... production in He/O2 mixtures in flowing low pressure plasmas
Chemical oxygen-iodine lasers (COIL) are attractive for diverse industrial applications because they are capable of high efficiency, high power operation, and because the 1.315 mm wavelength can be transmitted through fiber optics and couples efficiently with most metals. Conventional COILs are pumped with O2s Dd that is generated by reaction of Cl2 in a basic H2O2 solution. Current trends in p...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 1996